A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor

摘要

The authors developed a novel method for fabricating microporous dielectric layers on capacitive pressure sensors using a mixture of sugar and PDMS. In order to obtain different layer morphologies, a mold was used to control morphology during 3D printing. The microporous structures of the sensors produced showed enhanced deformability and large changes in dielectric constant. In addition, sensors showed high sensitivities from 0.00832 to 0.01097 kPa(-1) at low pressure (similar to 10 kPa), and from 0.06285 to 0.51285 kPa(-1) at medium pressure (10-100 kPa). Maximum hysteresis was 6.49%, stabilities were 0.1726 at 1 kPa and 0.1809 at 50 kPa, and response time was 200 ms. (C) 2017 Elsevier B.V. All rights reserved.