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机译:研究具有更好缺陷性能并促进CMP后清洁的阻挡浆
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China|Hebei Univ Technol, Sch Elect Informat Engn, Tianjin Key Lab Elect Mat & Devices, Tianjin 300130, Peoples R China;
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China|Hebei Univ Technol, Sch Elect Informat Engn, Tianjin Key Lab Elect Mat & Devices, Tianjin 300130, Peoples R China;
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China;
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China;
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China;
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China;
Hebei Univ Technol, Inst Microelect, Tianjin 300130, Peoples R China;
Chemical mechanical planarization; Barrier slurry; Particle size; Defect free; Scratch; Galvanic corrosion;
机译:Ceria浆料:用于CMP后清洗的替代浆料
机译:不同清洁力对氧化物后CMP清洗过程中CE-O-Si键合的影响
机译:表面活性剂在CMP后清洁过程中促进苯并三唑的去除和抑制铜腐蚀的应用
机译:阻挡浆性能对后CMP清洗效率的影响研究
机译:开发用于a-SiC和锰CMP的配方以及CMP后的钴清洗。
机译:坦桑尼亚南部农村地区的清洁家庭送货:障碍影响者和促进者
机译:新型清洗液与各种螯合剂的比较,用于多晶硅薄膜的Cmp后清洗