Influence of dual Ge/C pre-amorphization implantation on the Ni_(1-x)Pt_xSi phase nucleation and growth mechanisms

摘要

The impact of dual Ge/C pre-amorphization implantation (PAI) processes on the Ni0.9Pt0.1(7 nm)/Si system phase sequence has been investigated by advanced X-ray diffraction techniques and transmission electron microscopy (TEM). Using a high carbon implantation dose, it is found that the expected development of Ni-rich phases is not observed: a thick amorphous Ni1_xPtxSi layer developed until Ni0.9Pt0.1 full consumption, followed by the development of a thin crystalline Ni1_xPtxSi layer along the TiN interface. By increasing the temperature further, this last one abruptly thicken, creating the final silicide layer. An alternative model to grain boundary diffusion is discussed, accounting for the final distribution of the foreign species within the silicide layer. The use of Ge in dual Ge/C PAI processes is proposed to impact the growing mechanisms by alloying to fine-tune the carbon distribution in the substrate sub-surface.