Micropump for Generation and Control of Vacuum Inside Miniature Devices

摘要

The microengineered MEMS-type ion-sorption micropump with field-emission electron source has been shown. Effective emission properties of the carbon nanotubes cathode ensure satisfactory efficiency of residual gas ionization, showing possibility of active pumping of circa 0.05 cm3 volume down to 10-5 hPa. Measurement of ion current allows estimation of vacuum level inside the microcavity.