机译:带有多个散热器的皮拉尼真空计的灵敏度提高和可测压力极限扩展的融合机理研究
Xi An Jiao Tong Univ Sch Microelect Xian 710049 Peoples R China|Chinese Acad Sci Inst Microelect Beijing 100049 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100049 Peoples R China;
Chinese Acad Sci Inst Microelect Beijing 100049 Peoples R China|Univ Chinese Acad Sci Beijing 100049 Peoples R China;
Tianjin Univ Tianjin Key Lab Imaging & Sensing Microelect Tech Tianjin 300072 Peoples R China;
Xi An Jiao Tong Univ Sch Microelect Xian 710049 Peoples R China;
Pirani vacuum gauge; Multi heat sinks model; Dynamic range extension; Sensitivity peaks;
机译:具有单晶硅加热器和散热器的CMOS兼容MEMS Pirani真空计
机译:线性可测大气压范围的浅间隙皮拉尼真空传感器的制作与研究
机译:高热测量腔室腔效应研究,具有改进的高真空制度敏感性
机译:具有互补凸点散热器和腔加热器的CMOS MEMS Pirani真空计
机译:真空高压高压高纤维绝缘的传热机制:实验和建模
机译:真空低压渗碳热处理过程中18Cr2Ni4WA钢的组织演变机理及其对表面硬度的影响
机译:通过激光感应加热将工作范围扩展至基于MEMS的真空计的低压