An electrostatically driven torsional resonator with two degrees of freedom (1st report) -the principle and the characteristics of motion-

摘要

An electrostatically driven torsional resonator with two degrees of freedom (TDF) is proposed. This resonator is characterized by that the electrostatic force is not applied to the moving element. The electrode gap does not directly lead to the difficulty of the consistence with low voltage drive and large moving range. The displacement of the moving plate is ensured when the distance between the electrode plate and the fixed plate is minimized.