Actuators based on the electrostatic principle are some of the most important devices in microsystems. However it is difficult to combine low voltage drive with large amplitude. In this paper, the operational characteristics of an electrostatically driven torsional resonator with two degrees of freedom (TDF) are theoretically investigated. The advantage of the resonator with TDF for obtaining low voltage drive and large amplitude is indicated. (C) 1998 Elsevier Science S.A. [References: 3]
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