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An Experimental Study of Fracture of LIGA Ni Micro-Electro-Mechanical Systems Thin Films

机译:LIGA Ni微机电系统薄膜断裂的实验研究

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摘要

This article presents the results of an experimental study of fracture in LIGA Ni micro-electro-mechanical systems (MEMS) thin films. Microtesting techniques are developed for the study of the J-resistance curve (J-Δa) behavior in compact tension (CT) thin film specimens. In-situ measurements of crack-tip strain are presented together with in-situ and ex-situ microscopic images of crack-tip deformation and fracture mechanisms. Fractographic observation showed a mixture of inclined fracture planes (slant fracture) that are relatively featureless and normal fracture planes that exhibit dimples and microholes resulting from plastic deformation.
机译:本文介绍了LIGA Ni微机电系统(MEMS)薄膜断裂的实验研究结果。开发了微测试技术来研究紧密拉伸(CT)薄膜样品中的J电阻曲线(J-Δa)行为。给出了裂纹尖端应变的原位测量以及裂纹尖端变形和断裂机理的原位和异位显微图像。分形观察表明,倾斜的断裂面(倾斜断裂)相对没有特征,而正常的断裂面则具有塑性变形导致的凹坑和微孔。

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  • 来源
    《Metallurgical and Materials Transactions A》 |2007年第6期|1223-1230|共8页
  • 作者单位

    Department of Mechanical and Aerospace Engineering Princeton University and Princeton Institute for the Science and Technologies of Materials Princeton NJ 08544 USA;

    Department of Physics and Geology Northern Kentucky University Highland Heights KY 41099 USA;

    Materials and Process Sciences Center Sandia National Laboratories Albuquerque NM 87185 USA;

    Southwest Research Institute San Antonio TX 78238 USA;

    Department of Mechanical and Aerospace Engineering Princeton University and Princeton Institute for the Science and Technologies of Materials Princeton NJ 08544 USA;

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