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Development of a Novel Parasitic-Type Piezoelectric Actuator

机译:新型寄生型压电执行器的开发

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摘要

A piezoelectric actuator based on parasitic motion principle is proposed and tested. The piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine (high accuracy) motions using dual-servo control method. The working principle of the proposed piezoelectric actuator is discussed, and finite-element method is adopted. A dynamic model of parasitic motion based on the LuGre friction model is simulated using matlab /Simulink. A prototype is manufactured to investigate working performance. Experimental results indicate that the maximum speed of the presented parasitic-type piezoelectric actuator is 7.95 mm/s and the resolution is 10 nm. These findings confirm the feasibility of the dual-servo nanopositioning system using piezoelectric stacks and flexure hinges.
机译:提出并测试了基于寄生运动原理的压电致动器。探索了压电致动器,以利用双伺服控制方法同时实现粗运动(长冲程)和精细运动(高精度)。讨论了所提出的压电致动器的工作原理,并采用了有限元方法。使用Matlab / Simulink模拟了基于LuGre摩擦模型的寄生运动动力学模型。制造原型来研究工作性能。实验结果表明,所提出的寄生型压电致动器的最大速度为7.95 mm / s,分辨率为10 nm。这些发现证实了使用压电叠层和挠性铰链的双伺服纳米定位系统的可行性。

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