DRIVE METHOD FOR PIEZOELECTRIC ACTUATOR, DRIVE CIRCUIT FOR PIEZOELECTRIC ACTUATOR, AND DRIVE SYSTEM FOR PIEZOELECTRIC ACTUATOR

摘要

The present invention is a drive method for a piezoelectric actuator, a drive circuit for a piezoelectric actuator, and a drive system for a piezoelectric actuator that can vibrate a piezoelectric element in a maximum amplitude state. The drive circuit for a piezoelectric actuator comprises: an acquisition unit that acquires operation information relating to the operation of the piezoelectric element in a portion of a period in one cycle of a drive cycle in which the piezoelectric element is driven; and a control unit that performs feedback control of the drive parameters for driving the piezoelectric element on the basis of the operation information.