Pole-Zero Temperature Compensation Circuit Design and Experiment for Dual-Mass MEMS Gyroscope Bandwidth Expansion

摘要

This paper presents a bandwidth expansion method for dual-mass microelectromechanical system (MEMS) gyroscopes based on the pole-zero temperature compensation method. When the sense loop operates under open conditions, the mechanical sensitivity of the gyroscope structure conflicts with the bandwidth and is governed by the frequency difference between the drive and the sense modes (min {Delta omega(1), Delta omega(2)}), which is proven to change with temperature during the experiment. The pole-zero temperature compensation proportional controller (PZTCPC) is proposed to expand the bandwidth under different temperatures based on the pole-zero compensation method. The force rebalancing combs stimulation method (FRCSM) is used to achieve accurate gyroscope bandwidth characteristics. The mechanical bandwidth of the gyroscope is proven to be approximately 13 Hz when the sense-mode loop is open, and the simulation results show that the PZTCPC method expands the bandwidth to greater than 91.7 Hz after the sense-mode loop is closed. The FRCSM experiments indicate that gyroscope bandwidth is expanded to 95 Hz at 40 degrees C, 94 Hz at 20 degrees C and 92 Hz at 60 degrees C, while the bandwidths at -40, 20, and 60 degrees C are all 93 Hz with the turntable method. The experimental curves match the simulation curves well and verify the simulation results. The new limiting condition of the closed-loop bandwidth is the trough generated by conjugate zeros, formed by superposition of in-phase and anti-phase sense modes.