Tribological properties of CVD diamond films against zirconia ceramic

摘要

Microcrystalline diamond (MCD), nanocrystalline diamond (NCD) and microcrystalline and nanocrystalline composite diamond (MNCD) films are all deposited on flat square shaped WC-6%Co substrates by using bias-enhanced hot filament chemical vapor deposition (HFCVD) apparatus. The diamond films are characterized with scanning electron microscope (SEM) and Raman spectrum. Typical diamond film features are exhibited in the observation of SEM and the analysis results of Raman spectrum. The tribological properties of diamond films against zirconia ceramic are conducted on a ball-on-plate type rotating reciprocating tribometer in ambient air. The average friction coefficients of MCD, NCD and MNCD film in stable period are 0.205, 0.181 and 0.138 respectively. The images of surface topography based on white-light interferometer suggest a very low wear rate of CVD diamond film.