机译:微波等离子体化学气相沉积的SiC在SiC上的合成:硅 - 脸和碳面的比较
National Key Laboratory on High Power Semiconductor Lasers Changchun University of Science and Technology Changchun 130022 China Suzhou Institute of Nanotechnology and Nano-Bionics Chinese Academy of Sciences Suzhou 215100 China;
National Key Laboratory on High Power Semiconductor Lasers Changchun University of Science and Technology Changchun 130022 China;
National Key Laboratory on High Power Semiconductor Lasers Changchun University of Science and Technology Changchun 130022 China Suzhou Institute of Nanotechnology and Nano-Bionics Chinese Academy of Sciences Suzhou 215100 China;
Suzhou Institute of Nanotechnology and Nano-Bionics Chinese Academy of Sciences Suzhou 215100 China;
Suzhou Institute of Nanotechnology and Nano-Bionics Chinese Academy of Sciences Suzhou 215100 China;
National Key Laboratory on High Power Semiconductor Lasers Changchun University of Science and Technology Changchun 130022 China;
Diamond; SiC; MPCVD; Silicon-face; Carbon-face;
机译:微波等离子体辅助化学气相沉积法沉积金刚石/β-SiC梯度复合膜
机译:偏置增强微波等离子体化学气相沉积法在6H-SiC单晶上沉积异质外延金刚石
机译:SiC衬底上微波等离子体化学气相沉积金刚石膜的制备与研究。
机译:SiC衬底微波等离子体化学气相沉积金刚石膜的制备及研究
机译:通过微波等离子体增强化学气相沉积(MPECVD)合成和表征金刚石薄膜。
机译:微波等离子体化学气相沉积法在4H-SiC上异质外延金刚石生长
机译:利用微波等离子体化学气相沉积法在4H-siC上生长异质外延金刚石
机译:通过微波等离子体辅助化学气相沉积在高温下高生长率同质外延金刚石膜沉积