The effect of thickness on the Bi-Ge-Sb-Te films for reversible phase-change optical recording

摘要

The Bi-Ge-Sb-Te phase-change recording films were prepared by the dc magnetron sputtering of a Bi_5Ge_9Sb_(68)Te_(18) target in an atmosphere of Ar. The surface of the Bi-Ge-Sb-Te films grew in the form of needles as the film thickness increased. There was the close relation among the film thickness, surface roughness, and optical properties. The Bi-Ge-Sb—Te film with a thickness of 16nm had the lowest jitter value and the highest modulation value. As the results, the film thickness affected the Bi-Ge-Sb-Te film for phase-change optical recording significantly.