ZrO_2 thin films and ZrO_2/SiO_2 optical reflection filters deposited by sol-gel method

摘要

ZrO_2 thin films were deposited by a wet chemical sol-gel method from forced hydrolysis of aqueous ZrOCl_2 solution. Transmission electron microscopic observations confirmed the existence of little nanosized monoclinic ZrO_2 particles in Clear stable ethanolic ZrO_2 colloidal suspensions. Twenty layers of ZrO_2/SiO_2 high reflectance filters using a quarterwave Stack were fabricated by sol-gel spin-coating on K9 glass substrate. This filter exhibits a wide reflectance band near 1064 Nm and a high transmittance region.