Microwave characteristics of soft magnetic materials: FeZrN thin films and their dependence on nitrogen concentration

摘要

Ferromagnetic resonance (FMR) studies of FeZrN films prepared by RF sputtering with N_2 partial pressure=0.05, 0.075, 0.10 and 0.15 are used to determine their microwave characteristics. These room temperature studies at 9.29 GHz and for in-plane orientation of the applied field H show that both the resonance field H_r and the line-width ΔH have 180° symmetry representing uniaxial anisotropy H_k. However with increase in x, H_k decreases but ΔH and H_r increase. The calculated cut-off FMR frequency for H=0 systematically decreases from 1.62 GHz for x=0.05 to 1.34 GHz for x=0.15. This suggests that the film with x=0.05 has the best overall microwave properties for high-frequency applications.