High-speed preparation of c-axis-oriented YBa_2Cu_3O_(7-δ) film by laser chemical vapor deposition

摘要

YBa_2Cu_3O_(7-δ) (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)_3, Ba(DPM)_2/Ba (TMOD)_2 and Cu(DPM)_2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h~(-1), which was 10-1000 times higher than that of conventional MOCVD.