Nanostructured PZT/PT multilayered thin films prepared by sol-gel process

摘要

The morphological progression of PZT thin films (Zr/Ti: 53/47) prepared by sol-gel method has been studied by annealing the films at 650 ℃ for different durations. FESEM analysis could detect the presence of very small amount of pyrochlore phase (showing different morphology) in the films annealed for 30 min, 1 h, 3 h and 4 h. However, the very small percentage of the pyrochlore phase present in the 1-h annealed film could not be detected by XRD. The annealing duration was optimized to 2 h with no evidence of any pyrochlore phase in the FESEM microstructure but only grains corresponding to pure perovskite phase. The present study reveals the presence of the pyrochlore phase as the reason for degraded properties in PZT films which have been otherwise characterized as pure perovskite phase by XRD.