Oriented of micron-thick Y_3Fe_5O_(12) film on Gd_3Ga_5O_(12) substrate based on layer by layer growth method

摘要

In this paper, oriented of micron-thick yttrium-iron-garnet ferrite films were deposited on Gd3Ga5O12 substrate by magnetron sputtering based on layer-by-layer growth method. The effect of layer by layer growth method on films morphology, crystal structure and magnetic properties were investigated. Xray diffraction 0-20 reveals the maximum thickness of oriented film was increased by layer-by-layer growth method. In addition, scanning electron microscopy displays excellent morphology with uniform size of grain for the film prepared under 2.4 mu m@800 nm condition. Magnetic hysteresis loops and FMR spectrum represent this layer-by-layer growth method can effective increase film saturation magnetization and decrease FMR linewidth. Specifically, oriented micron-thick (2.4 mu m) YIG film with only 12 Oe of FMR linewidth has been obtained by this layer-by-layer growth method.