A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

摘要

Laser heat-mode lithography is an important method for the fabrication of micro and nanostructure. A metal lift-off method through hyperbolic undercut of laser heat-mode lithography was proposed. In this method, a desirable hyperbolic undercut profile was used to replace the inverted trapezoid undercut, and the hyperbolic undercut profile can be obtained through laser heat-mode lithography technique. Cr structures of gratings, grids and planar spiral inductor with a minimum linewidth of 0.42 mu m and a height of 100 nm were obtained successfully. These indicate that the lift-off process through hyperbolic undercut of laser heat-mode lithography can be used to fabricate the submicron metal structures. (C) 2020 Elsevier B.V. All rights reserved.