Structural Properties of SnO_2 Nanostructures Grown by Rapid Thermal Chemical Vapour Deposition at Lower Temperature

摘要

SnO_2 nanostructures were grown using rapid thermal chemical vapor deposition. Mo boat as evaporation source was encapsulated in quartz sub-chamber having gas inlet and whole assembly was enclosed in vacuum chamber. Morphological observations show nanocrystals, nanowires, rectangular nanobars and nanopetal like structures grown by rapid evaporation of Sn powder at different temperature and 1 mTorr oxygen pressure. X-ray diffraction analysis revealed crystalline rutile SnO_2 structure. XPS spectra gives split in oxygen O1s peak whereas Raman spectra exhibits new bands at 112, 126, 157.4 cm~(-1) related to SnO phase for samples grown at 400-500 ℃. Noise in XPS and Raman spectra for samples of 400-500 ℃ reflects poor crystallinity and high defects.