UV-LIGAにより作製されたニッケル材の摩耗特性に及ぼす 摩耗過程における結晶変化の影響

摘要

In this study, in order to clarify the influence of contact pressure on the wear characteristics of LIGA-Ni (Lithographie, Glvanoformung, Abformung-Nickel)and the difference between wear characteristics of LIGA-Ni and rolled Ni, the wear characteristics of the LIGA-Ni and the rolled Ni against the contact pressure were investigated. The wear mechanism was discussed from the standpoints of crystalline structure. Furthermore, the cause of crystalline alteration was discussed. Experimental result has shown that the LIGA-Ni specimen and the rolled Ni specimen have different wear characteristics with respect to the contact pressure. The wear amount of the rolled Ni specimen increased in proportion to the contact pressure. On the other hand, the wear amount of some of the LIGA-Ni specimen deviated greatly from the proportionate increase at the contact pressure around 4500 MP a, and it increased abruptly. It became clear that this cause was the difference of crystalline alteration during the wear process. In the rolled Ni specimen, the crystal refined gradually as the contact pressure increased, and the wear increased proportionately. On the other hand, in the LIGA-Ni specimen, the crystal changed from coarsening to refining as the contact pressure increased, whereby the amount of wear increased disproportionately.%UV-LIGA (Ultraviolet-Lithographie, Galvanoformung, Abformung)とは，微細なパター ニングが可能なUVリソグラフィにより作製し たフォトレジスト型に，電鋳により金属を厚く成 膜することで微細な構造体を作製する手法であ る.金属から成る微細な構造体を作製できる ことから，微小歯車や微小ばねといった厚みのあ る駆動部品の加工技術として，応用展開が期待さ れている.しかしながら，UV-LIGAにより作製した駆動部品の実用化は停滞しており，特殊な腕 時計部品などごく一部に留まっている.その 原因の一つとして.部品の信頼性を担う摩耗特性 の知見が不十分であることが挙げられる.