机译:用于高级栅极材料的氮掺杂多晶硅的薄膜特性
Department of Chemical Engineering and Division of Energy Systems Research, Ajou University, San 5 Woncheon-dong, Yeongtong-gu, Suwon 443-749, Korea;
Eugene Technology Co. Ltd., 209-3 Chuge-ri, Yangji-myun, Yongin 449-824, Korea;
Eugene Technology Co. Ltd., 209-3 Chuge-ri, Yangji-myun, Yongin 449-824, Korea;
Department of Chemical Engineering and Division of Energy Systems Research, Ajou University, San 5 Woncheon-dong, Yeongtong-gu, Suwon 443-749, Korea;
Department of Chemical Engineering and Division of Energy Systems Research, Ajou University, San 5 Woncheon-dong, Yeongtong-gu, Suwon 443-749, Korea;
n-doped Si; low pressure chemical vapor deposition; grain size; surface roughness;
机译:先进SLS ELA多晶硅膜中制造的双栅极TFT的特性
机译:作为先进的CMOS栅极电极的多晶硅膜的前驱体,乙硅烷的制造优势
机译:氮对多晶硅/掺氮硅薄膜热处理过程中硼扩散的影响
机译:高级浇口材料氮掺杂多晶硅的结构和形态学性能
机译:薄膜晶体管应用的多晶硅/电介质/衬底材料系统:材料特性对晶体管性能和可靠性的影响。
机译:单晶多晶材料和薄膜的变形:综述
机译:恢复溶液处理的硅薄膜研讨会的功能特性,有关高级无机材料和光伏概念/欧洲材料研究会春季会议
机译:存储器件介观多晶硅薄膜的边界和电子传导性质