Near-Infrared Light Emission from Er-doped ZnO Thin Film in Micropits Processed on Si Substrate

Shigeru Tanaka; Yukari Ishikawa; Naoki Ohashi; Junichi Niitsuma; Takashi Sekiguchi; Noriyoshi Shibata

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Near-Infrared Light Emission from Er-doped ZnO Thin Film in Micropits Processed on Si Substrate

机译：Si衬底上微坑中掺Er的ZnO薄膜的近红外光发射

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摘要

We have obtained Er-doped ZnO thin film in a micropattern of reverse trapezoids processed on Si substrate by sputtering and ultrafine polishing techniques. Near-infrared light emission was detected successfully from the thin film filling a single micropit with 10 μm square. Transmission electron microscopy (TEM) observation showed epitaxial growth of ZnO crystals along the curvature of the micropit.

机译：我们通过溅射和超细抛光技术在硅衬底上加工的反向梯形微图案中获得了掺Er的ZnO薄膜。从充满10μm正方形的单个微坑的薄膜中成功检测到近红外光发射。透射电子显微镜（TEM）观察显示ZnO晶体沿微坑的曲率外延生长。

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来源
《Key Engineering Materials 》 |2006年第2006期| p.113-116| 共4页
作者
Shigeru Tanaka; Yukari Ishikawa; Naoki Ohashi; Junichi Niitsuma; Takashi Sekiguchi; Noriyoshi Shibata;
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作者单位

Japan Fine Ceramics Center (JFCC), 2-4-1 Mutsuno, Atsuta, Nagoya 456-8587, Japan;

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原文格式 PDF
正文语种 eng
中图分类工程基础科学 ;
关键词
ZnO; erbium; thin film; photoluminescence; cathodoluminescence; infrared; micro array;

机译：ZnO;er;薄膜;光致发光;阴极发光;红外;微阵列;

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1. Influence of annealing on the 1.5 mu m light emission of Er-doped ZnO thin films and its crystal quality [J] . Ishikawa Y, Okamoto M, Tanaka S, Journal of Materials Research . 2005 ,第9期

机译：退火对掺Er的ZnO薄膜1.5μm发光及其晶体质量的影响
2. Study of near white light emission for ZnO thin films grown on silicon substrates [J] . Jianguo Lv, Changlong Liu, Wanbing Gong, Semiconductor science and technology . 2012 ,第11期

机译：硅衬底上生长的ZnO薄膜的近白光发射研究
3. High transmittance Er-doped ZnO thin films as electrodes for organic light-emitting diodes [J] . Shi Ying-Li, Hu Yun, Wang Shuang-Peng, Applied Physics Letters . 2019 ,第25期

机译：高透射率ER掺杂的ZnO薄膜作为有机发光二极管的电极
4. Near-Infrared Light Emission from Er-doped ZnO Thin Film in Micropits Processed on Si Substrate [C] . Shigeru Tanaka, Yukari Ishikawa, Naoki Ohashi, Electronics Division meeting of the Ceramic Society of Japan . 2006

机译：在Si衬底上加工的微型计算机中的ER掺杂ZnO薄膜近红外发光
5. Investigation of light absorption and emission in germanium and germanium tin films grown on silicon substrates. [D] . Mathews, Jay. 2011

机译：研究硅衬底上生长的锗和锗锡膜中的光吸收和发射。
6. Influence of the Substrate Process Conditions andPostannealing Temperature on the Properties of ZnO Thin Films Grownby the Successive Ionic Layer Adsorption and Reaction Method [O] . BijoyChandra Ghos, Syed Farid Uddin Farhad, *, 2021

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7. Light emission enhancement from ZnO nanostructured films grown on Gr/SiC substrates [O] . Khranovskyy, Volodymyr, Shtepliuk, Ivan, Ivanov, Ivan Gueorguiev, 2016

机译：在Gr / SiC衬底上生长的ZnO纳米结构薄膜的发光增强

Near-Infrared Light Emission from Er-doped ZnO Thin Film in Micropits Processed on Si Substrate

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