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机译:抗振动白光垂直扫描干涉法(VSI)的创新条纹锁定策略的开发
Graduate Institute of Automation Technology, National Taipei University of Technology, 1, Sec. 3, Zhongxiao East Rd. Taipei, Taiwan 106;
rnGraduate Institute of Automation Technology, National Taipei University of Technology, 1, Sec. 3, Zhongxiao East Rd. Taipei, Taiwan 106;
rnDepartment of Mechanical Engineering, Lunghwa University of Science and Technology No.300, Sec.1, Wanshou Rd., Guishan, Taoyuan County 33306,Taiwan (R.O.C.);
rnGraduate Institute of Electro-Optical Engineering, National Taipei University of Technology, 1, Sec. 3, Zhongxiao East Rd. Taipei, Taiwan 106;
rnIndustrial Technology Research Institute (ITRI), 321, Sec. 2, Guang Fu Rd. Hsinchu, Taiwan 30031;
rnIndustrial Technology Research Institute (ITRI), 321, Sec. 2, Guang Fu Rd. Hsinchu, Taiwan 30031;
vibration resistant; nano-scale measurement; active feedback system; real-time control system; automatic optical inspection (AOI);
机译:采用双感应配置和主动条纹锁定策略的原位扫描白光干涉仪
机译:白光垂直扫描干涉法中的条纹调制偏斜效应
机译:通过白光垂直扫描干涉法检查用于扫描电化学显微镜的超微电极,并通过电沉积金填充凹入式尖端
机译:抗震白光垂直扫描干涉学创新的边缘锁定策略的开发(VSI)
机译:改进的垂直扫描干涉仪。
机译:垂直扫描干涉法中双波长白色LED的新型表面恢复算法(VSI)
机译:垂直扫描干涉法中双波长白色LED的新型表面恢复算法(VSI)
机译:白光条纹估计:算法,误差源和缓解策略