A Novel Surface Recovery Algorithm for Dual Wavelength White LED in Vertical Scanning Interferometry (VSI)

摘要

The two peaks characteristic of yellow and blue light in the spectrum of dual-wavelength white light emitting diodes (LEDs) introduce distinctive features to the interference signal of white light scanning interferometry (WLSI). The distinctive features are defined as discontinuities, so that the fringe contrast function cannot be modeled as a single Gaussian function, and causes the interferogram to have uneven distribution of fringes of different orders in the scanning interferometer. This phenomenon leads to the low accuracy of the zero-order fringe position in the envelope calculation, which affects the repeatability and accuracy of the interferometry. This paper proposes a new surface recovery algorithm based on the Hilbert phase envelope and adjacent reference points calculation, which can effectively overcome the influence of the discontinuous signal of dual-wavelength LED white light interference on the three-dimensional reconstruction of WLSI measurements. The reliability of the algorithm is verified by experiments, and the measurement accuracy of LED WLSI system is evaluated.