首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Optical Focusing Of Plasmonic Fresnel Zone Plate-based Metallic Structure Covered With A Dielectric Layer
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Optical Focusing Of Plasmonic Fresnel Zone Plate-based Metallic Structure Covered With A Dielectric Layer

机译:覆盖有介电层的等离子菲涅耳带状板金属结构的光学聚焦

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摘要

By modulating the zone width of a plasmonic Fresnel zone plate, consisting of metallic nanostructures covered with a dielectric layer, the authors demonstrated numerically that a focused beam can be achieved with higher intensity and smaller spot size than the diffraction-limited conventional Fresnel zone plate. Rigorous electromagnetic simulation predicts a full width at half maximum of 162 nm (equivalent to an effective numerical aperture of 1.30) at 0.5 μm focal length, using 405 nm wavelength illumination. This sub-diffraction-limit focusing has potential in applications such as maskless nanolithography, high resolution scanning optical microscopy, optical data storage, and optical antenna. This focusing capability is related to extraordinary optical transmission, which is explained by the complex propagation constant in the zones afforded by higher refractive index dielectric layer and surface plasmons.
机译:通过调制由覆盖有介电层的金属纳米结构组成的等离子菲涅耳波带片的区域宽度,作者在数值上证明与聚焦受限的常规菲涅耳波带片相比,聚焦光束可以实现更高的强度和更小的光斑尺寸。严格的电磁模拟使用405 nm波长照明在0.5μm焦距下预测了162 nm的半峰全宽(等效于1.30的有效数值孔径)。这种亚衍射极限聚焦在诸如无掩模纳米光刻,高分辨率扫描光学显微镜,光学数据存储和光学天线等应用中具有潜力。这种聚焦能力与非凡的光学传输有关,这可以通过较高折射率的介电层和表面等离子体激元提供的区域中的复杂传播常数来解释。

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