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机译:显影液温度过高对电子束曝光的倍半硅氧烷氢倍增图形抗蚀剂的影响
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801;
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801;
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801;
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801;
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801,Also at School of Information and Communications, Gwangju Institute of Science and Technology;
Micro and Nanotechnology Laboratory and Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801;
机译:显影剂温度对电子束曝光的氢倍半硅氧烷氢致抗蚀剂的影响
机译:热固化和电子束暴露的倍半硅氧烷氢抗蚀剂的比较研究
机译:使用氢倍半硅氧烷抗蚀剂制造的超致密金纳米结构及其在表面增强拉曼光谱中的应用
机译:氢倍半硅氧烷(HSQ):一种完美的负性抗蚀剂,用于在硅平台上显影纳米结构图案
机译:使用氢倍半硅氧烷抗蚀剂的纳米光刻和纳米加工。
机译:使用电子束辐照图案化氢倍半硅氧烷氢膜的机械性能以用于机械细胞引导
机译:用氢倍半硅氧烷抗蚀剂技术改进硅量子点单电子转移操作