Molecular beam epitaxy as a method for the growth of freestanding zinc-blende (cubic) GaN layers and substrates

摘要

The authors have studied the growth of bulk, freestanding zinc-blende (cubic) GaN layers by plasma-assisted molecular beam epitaxy (PA-MBE). They have established that the best structural properties of freestanding zinc-blende GaN can be achieved with initiation under Ga-rich conditions but without Ga droplet formation. It is difficult to initiate the growth of zinc-blende GaN, but it is even more difficult to sustain the growth of the pure zinc-blende polytype in thick layers without any wurtzite inclusions. In order to grow high quality freestanding cubic GaN layers, it is necessary to maintain the same growth conditions for about 1 week. The best quality zinc-blende phase GaN was achieved in the first 10 μm of the GaN layers. The authors have produced zinc-blende GaN substrates from our thick bulk GaN layers and they used the side previously attached to the GaAs substrate as the episide of these zinc-blende GaN substrates. They have demonstrated the scalability of the process by growing zinc-blende GaN layers on 2 and 3 in. diameter wafers. The growth of freestanding bulk GaN layers has allowed them to refine the value for the lattice parameter of zinc-blende GaN as 4.510 ±0.005 A. They have demonstrated that the PA-MBE process developed has allowed them to grow freestanding Al_xGa_(1-x)N wafers.