Improved performance of nonevaporable getter activated by a continuous wave infrared laser

摘要

We demonstrate a simple and efficient activation method of nonevaporable getter where a local heating is provided by a laser source. Dependence of various parameters such as laser power, scan speed, and irradiation time by the degree of getter activation was experimentally examined in detail. It is shown that the laser irradiation enhances the getter activation process considerably by Shortening the time and increasing the gas absorption capacity required to achieve a desired vacuum Level for flat panel display application.