首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Vertically aligned carbon nanofiber-based field emission electron sources with an integrated focusing electrode
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Vertically aligned carbon nanofiber-based field emission electron sources with an integrated focusing electrode

机译:具有集成聚焦电极的垂直排列的基于碳纳米纤维的场致发射电子源

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摘要

We report on the design, fabrication, and initial characterization of vertically aligned carbon nanofiber-based microfabricated field emission devices with an integrated out-of-plane electrostatic focusing electrode. The potential placed on this electrode was found to have a profound impact on the diameter of the beam emitted from the device as observed on a phosphor screen. Aspects of the device fabrication process and device operation are discussed. The experimental results obtained are compared to a numerical simulation of device performance and found to be within good agreement.
机译:我们报告了具有集成平面外静电聚焦电极的垂直排列的基于碳纳米纤维的微制造场发射器件的设计,制造和初始表征。发现在该电极上的电势对在荧光屏上观察到的从该装置发射的光束的直径具有深远的影响。讨论了器件制造过程和器件操作的各个方面。将获得的实验结果与设备性能的数值模拟进行比较,发现结果吻合良好。

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