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首页> 外文期刊>Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures >Composite-layered solid-state field controlled emitter for a better control of the cathode surface barrier
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Composite-layered solid-state field controlled emitter for a better control of the cathode surface barrier

机译:复合层固态场控发射极,可更好地控制阴极表面势垒

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Experimental measurements have shown that electron emission was obtained from metallic planar surfaces covered with ultrathin wide band gap semiconductor layers. To get a better control of the effective surface barrier, we proposed a composite-layer nanostructured solid-state field controlled emitter with two ultrathin layers of 4 nm GaN and 2 nm Al_(0.5)Ga_(0.5)N. This composite structure defined a quantum well at the cathode surface. The threshold of the applied field to obtain electron emission was in the range of 100 V/μm. To interpret these experimental results, we propose a dual-barrier model related to the nanostructured layers and a serial two-step mechanism for the electron emission. In a first step, under the polarization, the electrons are injected into the ultrathin surface layer from the cathode substrate, creating a concentration of electrons in the GaN quantum well. This electron concentration or space charge formation induced an energy shift leading to a relative lowering of the vacuum level compared to the Fermi level of the substrate. We have measured the electron emission dependence with field and temperature of these cathodes and have determined an effective surface tunnelling barrier ≤ 0.5 eV consistent with an effective thermal activation energy of ~0.85 eV. Estimation of the effective barrier due to space charge formation from to the occupation of the localized bands in the quantum well is in good agreement with the experimental data.
机译:实验测量表明,电子发射是从覆盖有超薄宽带隙半导体层的金属平坦表面获得的。为了更好地控制有效表面势垒,我们提出了一种复合层纳米结构的固态场控发射极,该发射极具有两个超薄层,分别为4 nm GaN和2 nm Al_(0.5)Ga_(0.5)N。这种复合结构在阴极表面定义了一个量子阱。获得电子发射的施加场的阈值在100V /μm的范围内。为了解释这些实验结果,我们提出了与纳米结构层有关的双势垒模型和电子发射的串行两步机制。第一步,在极化作用下,电子从阴极基板注入超薄表面层,从而在GaN量子阱中产生电子浓度。与衬底的费米能级相比,这种电子浓度或空间电荷的形成引起能量转移,从而导致真空能级相对降低。我们测量了这些阴极的电子发射随场和温度的依赖性,并确定了有效的表面隧穿势垒≤0.5 eV,与有效的热活化能〜0.85 eV一致。估计由于形成空间电荷导致的有效势垒到量子阱中局部能带的占据与实验数据高度吻合。

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