Assembled microelectromechanical system microcolumns for miniature scanning electron microscopies

摘要

We report an assembled microelectromechanical system (MEMS) electrostatic microcolumn design that employs a multiwall carbon nanotube emitter as an electron source. The microcolumn is designed for a beam diameter of 10-20 nm with a beam energy of 1 keV at currents of up to 1 nA and a 100 μm field of view. The maximum voltage on any microcolumn component is ±1 kV. The microcolumn components are fabricated on a single 50 μm thick silicon on insulator wafer and are assembled to the prefabricated, self-aligning sockets in the device layer using MEMS grippers and connectors to realize an inexpensive and compact microcolumn. The electron beam traverses the entire microcolumn without exposure to any insulator. We have successfully assembled components of this design and operational testing is currently in progress.