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Dynamics and control of the shape and size of a sitting drop-like meniscus, occurring in single-crystal growth

机译:单晶生长中坐滴状半月板的形状和大小的动力学和控制

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This paper concerns the following topics: dependence of shape and size of a static meniscus sitting like a drop on the controllable part of pressure difference across the free surface; stability of static menisci; procedure for creation of a stable static meniscus, appropriate for the growth of a rod with constant radius; temperature gradients and crystallization front displacement; equation for crystal dimension change rate; evolution of crystal radius and of the level of crystallization front; and control of cross-section during growth. This kind of problems appears in semiconductor single-crystal rod growth from a melt by edge-defined film-fed growth (EFG) technique. The novel case where the upper radius of the meniscus is larger than the shaper radius and the meniscus is sitting like a drop is analyzed. For some of the topics numerical illustrations are given. The obtained results can be useful in experiment planning and technology design of single-crystal rod growth by the EFG method. With this aim this study was undertaken.
机译:本文涉及以下主题:静态弯月面的形状和大小的依赖关系,就像落在自由表面上压差的可控制部分上的液滴一样;静态半月板的稳定性;产生稳定的静态弯月面的程序,适用于半径恒定的杆的生长;温度梯度和结晶前沿位移;晶体尺寸变化率方程;晶体半径和结晶前沿水平的演变;在生长过程中控制横截面。这类问题出现在通过边沿限定膜馈送生长(EFG)技术从熔体中生长半导体单晶棒中。分析了弯月面的上半径大于整形器半径并且弯月面像滴一样坐着的新颖情况。对于某些主题,给出了数字插图。所得结果可用于通过EFG方法进行单晶棒生长的实验计划和技术设计。为此目的进行了这项研究。

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