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A Benchtop Method for the Fabrication and Patterning of Nanoscale Structures on Polymers

机译:在聚合物上制备和构筑纳米结构的台式方法

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摘要

A benchtop method for the facile production of nanoscale metal structures on polymers is demonstrated. This approach allows for the design and patterning of a wide range of metallic structures on inexpensive polymer surfaces, affording the fabrication of nanoscaled platforms for use in the design of sensors, actuators, and disposable electronic and photonic devices. Numerous structures, from simple nanowires to multilayered metallic gratings, are demonstrated, with sizes ranging from microns to the nanoscale. The process involves molding a malleable metal film deposited on a rigid substrate such as mica, by the compression of a plastic polymer stamp with the desired pattern against the metal film. While under compression, an etchant is then used to modify the metal. Upon separation of the stamp from the support, micro- to nanoscaled metallic structures are found on the stamp and/or on the substrate. The sizes of the structures formed depend on the sizes of the features on the stamp but can be fine-tuned by about 4-fold through variations in both pressure and duration of etching. Also, depending on the processing, multiple dimension metallic structures can be obtained simultaneously in a single stamping procedure. The metallic structures formed on the stamp can also be subsequently transferred to another surface allowing for the construction of multilayered materials such as band gap gratings or the application of electrical contacts. Using this approach, fabrication of both simple and complex micro- to nanoscaled structures can be accomplished by most any researcher as even the grating structure of commercial compact disks may be used as stamps, eliminating the requirement of expensive lithographic processes to form simple structures.
机译:证明了一种在聚合物上轻松生产纳米级金属结构的台式方法。这种方法允许在廉价的聚合物表面上设计和构图各种金属结构,从而提供用于传感器,致动器以及一次性电子和光子设备设计的纳米级平台的制造。展示了从简单的纳米线到多层金属光栅的多种结构,尺寸范围从微米到纳米。该方法包括通过将具有所需图案的塑料聚合物压模压靠在金属膜上来模制沉积在诸如云母之类的刚性基底上的可延展金属膜。在压缩下,然后使用蚀刻剂对金属进行改性。当压模与支撑体分离时,在压模和/或基底上发现了微米级至纳米级的金属结构。形成的结构的尺寸取决于压模上的特征的尺寸,但是可以通过改变压力和蚀刻持续时间来微调约4倍。而且,根据工艺,可以在单个冲压过程中同时获得多维金属结构。形成在压模上的金属结构也可以随后转移到另一个表面,从而允许构造多层材料,例如带隙光栅或施加电触点。使用这种方法,几乎​​任何研究人员都可以完成简单和复杂的微米级到纳米级结构的制造,因为即使商用光盘的光栅结构也可以用作印模,从而消除了形成简单结构所需的昂贵光刻工艺。

著录项

  • 来源
    《Journal of the American Chemical Society》 |2004年第2期|p. 628-634|共7页
  • 作者单位

    Department of Chemistry, College of Staten Island and the Graduate Center of the City University of New York, 2800 Victory Boulevard, Staten Island, New York 10314;

    Department of Chemistry, Hunter College and the Graduate Center of the City University of New York, 695 Park Avenue, New York, New York 10021;

    NIST, 100 Bureau Drive Mailstop 8372, Surface and Microanalysis Science Division, Gaithersburg, MD 20899;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);美国《化学文摘》(CA);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

  • 入库时间 2022-08-18 03:24:38

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