Temperature Dependence in Erosion Rates of Polyimide Under Hyperthermal Atomic Oxygen Exposures

摘要

The temperature dependence of the erosion rates of polyimide film in the hyperthermal atomic oxygen exposures was examined. It was observed that the activation energies of the polyimide erosion was 5.7 x 10~(-4) eV for the 5.0-eV atomic oxygen beam, whereas it was 4.5 x 10~(-2) eV for the 1.1-eV atomic oxygen beam at the temperature range between 253 and 353 K. Presence of the translational energy effects on the erosion yield and the temperature dependence of polyimide erosion were experimentally verified.