Impingement Angle Dependence of Erosion Rate of Polyimide in Atomic Oxygen Exposures

摘要

The dependence on impingement angle of atomic oxygen reac- tion with polyimide film was investigated. In situ mass loss mea- surements during atomic oxygen beam exposure clearly indicated that the erosion rate of polyimide obeys a cosine law. The physi- cal explanation of this phenomenon was made by considering the microscopic impingement angle at the polyimide surface under the presence of the microscale roughness.