Active matrix monolithic micro-LED full-color micro-display

摘要

An active matrix monolithic micro-LED full-color micro-display with a pixel density of 317 ppi is demonstrated. Starting from large-scale and low-cost GaN-on-Si epilayers, monolithic 64 x 36 blue micro-LED arrays are fabricated and further transformed to full-color micro-displays by applying a photo-patternable color conversion layer. This full-color fabrication scheme shows feasible manufacturability, suggesting a potential for volume production of micro-LED full-color micro-display.