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机译:具有两级空气悬浮电极的基于A1N的RF MEMS可调电容器
Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ., 447-1 Wolgye-Dong,Nowon-Gu, Seoul, 139-701, Korea;
Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ., 447-1 Wolgye-Dong,Nowon-Gu, Seoul, 139-701, Korea;
Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ., 447-1 Wolgye-Dong,Nowon-Gu, Seoul, 139-701, Korea;
Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ., 447-1 Wolgye-Dong,Nowon-Gu, Seoul, 139-701, Korea;
Micro/Nano Devices and Packaging Laboratory, Department of Electronic Engineering, Kwangwoon Univ., 447-1 Wolgye-Dong,Nowon-Gu, Seoul, 139-701, Korea;
tunable capacitor; rf mems; aluminum nitride; air-gap; wide tuning range; capacitance;
机译:具有叉指式RF和激励电极的拉链式RF MEMS可调电容器
机译:基于MEMS技术的RF可调电容器
机译:使用四重串联电容器和带有介电桥结构的缝隙的CMOS嵌入式大功率处理RF-MEMS可调电容器
机译:具有分段电极和增强结构的线性可调MEMS电容器
机译:使用集成的可移动自掩蔽技术实现的线性可调RF-MEMS电容器。
机译:平面外单环解耦CMOS-MEMS陀螺仪的基于寄生不敏感开关电容感应电路的失调抵消
机译:带有分段电极和旋转电热驱动的MEMS可调谐电容器