Design and simulation a large stroke MEMS-based linear motor for fourier transform spectrometer applications

Ehsan Atashzaban; Muhammad Sadegh Mehragha

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Design and simulation a large stroke MEMS-based linear motor for fourier transform spectrometer applications

机译：基于傅里叶变换光谱仪应用的基于大行程MEMS的线性电动机的设计和仿真

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In this paper a MEMS-based linear motor for Fourier transform spectrometer (FTS) has been designed and simulated. The FTS consists of a Michel-son interferometer and Linear micro motor (LMM); Linear micro motor consist of two main parts; slider, and gripper. Maximum step size is equal to 3 μm; large stroke will be achieved by repeating the step sizes sequentially. Maximum amount of the large stroke is equal to 400 μm.

机译：本文设计并仿真了基于MEMS的傅立叶变换光谱仪（FTS）线性电动机。 FTS由一个迈克尔逊干涉仪和线性微型电动机（LMM）组成；线性微型电动机包括两个主要部分；滑块和抓手。最大步长等于3μm；通过顺序地重复步长可以实现大行程。大行程的最大数量等于400μm。

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来源
《Journal of Optics 》 |2013年第4期| 341-348| 共8页
作者
Ehsan Atashzaban; Muhammad Sadegh Mehragha;
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作者单位

Electrical engineering Department, Sahand University of Technology, Sahand, Iran;

Electrical engineering Department, Shahid Chamran University, Sahand, Iran;

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收录信息美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类
关键词
FTS; Wave train; Linear motor; Slider; Gripper; Array of V-beam actuators;

机译：FTS;波浪列车;直线电机;滑块;夹爪;V型梁执行器阵列;

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1. Design and simulation a large stroke MEMS-based linear motor for fourier transform spectrometer applications [J] . Ehsan Atashzaban, Muhammad Sadegh Mehragha Journal of Optics . 2013 ,第4期

机译：基于傅里叶变换光谱仪应用的基于大行程MEMS的线性电动机的设计和仿真
2. A MEMS-based resonant-scanning lamellar grating Fourier transform micro-spectrometer with laser reference system [J] . Lee FW, Zhou GY, Yu HB, Sensors and Actuators, A. Physical . 2009 ,第2期

机译：带有激光参考系统的基于MEMS的共振扫描层状光栅傅里叶变换显微光谱仪
3. Global stratospheric fluorine inventory for 2004-2009 from Atmospheric Chemistry Experiment Fourier Transform Spectrometer (ACE-FTS) measurements and SLIMCAT model simulations [J] . A. T. Brown, M. P. Chipperfield, N. A. D. Richards, Atmospheric chemistry and physics . 2014 ,第1期

机译：2004 - 2009年全球平流层氟库存从大气化学实验傅立叶变换光谱仪（ACE-FTS）测量和SLIMCAT模型模拟
4. Principles and design of a planar waveguide Fourier transform spectrometer for remote-sensing applications [C] . H. Podmore, P. Cheben, A. Scott, Progress In Electromagnetic Research Symposium . 2016

机译：用于遥感应用的平面波导傅里叶变换光谱仪的原理和设计
5. Imaging Fourier Transform Spectroscopy from a Space Based Platform -- The Herschel/SPIRE Fourier Transform Spectrometer. [D] . Spencer, Locke Dean. 2009

机译：从基于空间的平台成像傅立叶变换光谱-Herschel / SPIRE傅立叶变换光谱仪。
6. Fourier transform spectrometer on silicon with thermo-optic non-linearity and dispersion correction [O] . Mario C. M. M. Souza, Andrew Grieco, Newton C. Frateschi, -1

机译：具有热光非线性和色散校正的硅上傅立叶变换光谱仪
7. Fourier Transform Infrared (FTIR) Spectroscopy, Attenuated Total Reflectance Fourier Transform Infrared (ATR–FTIR) Spectroscopy, Micro–Attenuated Total Reflectance Fourier Transform Infrared (Micro–ATR–FTIR) Spectroscopy, Macro–Attenuated Total Reflectance Fourier Transform Infrared (Macro–ATR–FTIR) Spectroscopy, Two–Dimensional Infrared Correlation Spectroscopy, Linear Two–Dimensional Infrared Spectroscopy, Non–Linear Two–Dimensional Infrared Spectroscopy, Atomic Force Microscopy Based Infrared (AFM–IR) Spectroscopy, Infrared Photodissociation Spectroscopy, Infrared Correlation Table Spectroscopy, Near–Infrared Spectroscopy (NIRS), Mid–Infrared Spectroscopy (MIRS), Nuclear Resonance Vibrational Spectroscopy, Thermal Infrared Spectroscopy and Photothermal Infrared Spectroscopy Comparative Study on Malignant and Benign Human Cancer Cells and Tissues under Synchrotron Radiation with the Passage of Time [O] . Alireza Heidari 2018

机译：傅里叶变换红外（FTIR）光谱，衰减总反射率傅里叶变换红外（ATR-FTIR）光谱，微衰减总反射率傅里叶变换红外（微ATR-FTIR）光谱，宏观衰减总反射率傅立叶变换红外（宏观 - ATR - ftir）光谱，二维红外相关光谱，线性二维红外光谱，非线性二维红外光谱，原子力显微镜的红外（AFM-IR）光谱，红外线光度分离光谱，红外相关表光谱，附近-Infarred光谱学（NIRS），中红外光谱（MIR），核共振振动光谱，热红外光谱和光热红外光谱比较对比较的恶性和良性人体癌细胞和组织在时滞辐射下的时间流逝

Design and simulation a large stroke MEMS-based linear motor for fourier transform spectrometer applications

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