机译:大功率处理应用中的新型多触点射频微机电系统开关
Peking University Institute of Microelectronics National Key Laboratory of Science Technology on Micro/Nano Fabrication Cheng Fu Road, Haidian District Beijing 100871 China;
Peking University Institute of Microelectronics National Key Laboratory of Science Technology on Micro/Nano Fabrication Cheng Fu Road, Haidian District Beijing 100871 China;
Peking University Institute of Microelectronics National Key Laboratory of Science Technology on Micro/Nano Fabrication Cheng Fu Road, Haidian District Beijing 100871 China;
Peking University Institute of Microelectronics National Key Laboratory of Science Technology on Micro/Nano Fabrication Cheng Fu Road, Haidian District Beijing 100871 China;
Peking University Institute of Microelectronics National Key Laboratory of Science Technology on Micro/Nano Fabrication Cheng Fu Road, Haidian District Beijing 100871 China;
radio frequency microelectromechanical system switches; ohmic contacts; microsprings; power-handling ability; metallic sacrificial layers; surface micromachining;
机译:大功率处理应用中的新型多触点射频微机电系统开关
机译:高κ电介质在宽带射频微机电系统电容并联开关中的应用
机译:通信系统射频微机电系统开关的特性
机译:低损耗单刀十二掷射频微机电系统开关
机译:射频(RF)微机电系统(MEMS)开关。
机译:评估射频技术和微机电系统获得的数据质量以测量团队运动中的外部工作负荷和集体行为变量的调查
机译:单极,八掷,射频,微机电系统开关,用于多带/多模前端模块
机译:坚固,可靠,射频(RF)微机电系统(mEms)电容开关