A low loss single-pole twelve-throw radio frequency microelectromechanical systems switch

摘要

This paper presents a method for improvements of radio frequency (RF) microelectromechanical systems (MEMS) switch which was previously reported at MEMS 2008 [1] and introduces a single-pole twelve-throw (SP12T) switch based on improved switch. The proposed switch was driven by a double stop (DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to be bidirectionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. This can make ground lines have same bias, and improve the RF characteristics. The 2-stage cascade type SP12T switch was developed based on an arrangement of the proposed RF MEMS switches.