Characteristics of Radio-Frequency Microelectromechanical-System Switches for Communication Systems

摘要

The static and modal characteristics of capacitive-coupling membrane-type radio-frequency (RF) microelectromechanical- system (MEMS) switches are comprehensively investigated by the finite element method. Static characteristics including displacement, stress, effective stiffness constant, and actuation voltage, and modal characteristics such as natural frequency and switching time are studied. The structures and the materials of the switches are the main factors that determine switch performance. The study focuses on how the static and modal characteristics of the RF MEMS switches are affected by their structures and materials.