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机译:LWR计量标准化的需求:imec粗糙度协议
imec, Kapeldreef, Leuven, Belgium;
Hitachi High-Technologies Corporation, Hitachinaka-shi, Japan;
imec, Kapeldreef, Leuven, Belgium;
imec, Kapeldreef, Leuven, Belgium;
imec, Kapeldreef, Leuven, Belgium;
imec, Kapeldreef, Leuven, Belgium;
Fractilia, Austin, Texas, United States;
Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California, United States;
EUV Tech, SuMMIT Software Division, Martinez, California, United States;
Institute of Nanoscience and Nanotechnology, NCSR Demokritos, Aghia Paraskevi, Greece,Nanometrisis P.C., Aghia Paraskevi, Greece;
Hitachi High-Technologies Corporation, Hitachinaka-shi, Japan;
Hitachi High-Technologies Corporation, Hitachinaka-shi, Japan;
Hitachi High-Technologies Corporation, Hitachinaka-shi, Japan;
line width roughness; power spectral density; reference metrology; roughness;
机译:纳米CMOS技术中线边缘粗糙度(LER)和线宽粗糙度(LWR)的研究:第一部分–建模和仿真方法
机译:纳米级CMOS技术中线边缘粗糙度(LER)和线宽粗糙度(LWR)的研究:第二部分-实验结果及其对器件可变性的影响
机译:标准化心血管磁共振成像(CMR)协议,心血管磁共振协会:标准化协议受托人委员会工作组
机译:LWR计量标准化的需求:imec粗糙度协议
机译:心脏骤停后治疗方案的标准化:治疗性体温过低的评估以及建立标准化心脏骤停后治疗方案的可能性。
机译:拟南芥中的渗透调节和渗透调节需要LWR1和LWR2
机译:LWR Metrology标准化的需要:IMEC粗糙度协议