机译:使用液体哑光涂层的抗反射遮光层
Brigham Young University, Department of Electrical and Computer Engineering, Provo, Utah, United States;
Brigham Young University, Department of Electrical and Computer Engineering, Provo, Utah, United States;
Brigham Young University, Department of Electrical and Computer Engineering, Provo, Utah, United States;
Brigham Young University, Department of Electrical and Computer Engineering, Provo, Utah, United States;
Brigham Young University, Department of Electrical and Computer Engineering, Provo, Utah, United States;
Brigham Young University, Department of Electrical and Computer Engineering, Provo, Utah, United States;
optics; antireflective; light blocking;
机译:在高分辨率光刻胶中使用纳米粒子悬浮液的宽带抗反射阻光层
机译:来自含s层的热中子的镜面反射和用于偏振涂层的抗反射底层的优化
机译:二维摆动曲线的概念,用于预测关键尺寸并在地形情况下优化抗蚀剂/抗反射涂层双层
机译:新型193nm顶级抗反射涂层,可有效减少摆动
机译:I.在超临界二氧化碳中制备的复合聚合物涂层。二。原子力显微镜探针的化学修饰。三,具有图案化化学和形貌的表面上的液体流动性
机译:使用液体哑光涂层的抗反射遮光层
机译:使用液体顶部哑光涂层的抗反射遮光层
机译:单层193nm光刻反射涂层的材料评价