Fabrication of transparent AlN ceramics

摘要

Aluminum nitride (AlN) is mostly known for its high theoreticalnthermal conductivity (320 W mK−1). In presentnwork, special attention has been given to the fabricationnof transparent AlN ceramics.nWith a wide band gap (6.3 eV) [1], AlN can be madentransparent, which when combined with its wear resistancenmake AlN attractive for some electrooptics applicationsn[2]. AlN is also used as a phase contrast layer innoptical disks and has potential as a phase shift material innlithographic photo mask [3]. These applications generatenan interest in the optical properties of AlN.