机译:退火温度对表面波微波等离子体化学气相沉积法生长的氮化非晶碳薄膜的光学,键合,结构和电性能的影响
Department of Environmental Technology and Urban Planning Nagoya Institute of Technology;
Department of Electronic Engineering Faculty of Engineering Chubu University;
Department of Electronic Engineering Faculty of Engineering Chubu University;
Department of Electronic Engineering Faculty of Engineering Chubu University;
Department of Electronic Engineering Faculty of Engineering Chubu University;
Department of Environmental Technology and Urban Planning Nagoya Institute of Technology;
Department of Environmental Technology and Urban Planning Nagoya Institute of Technology;
Department of Electronic Engineering Faculty of Engineering Chubu University;
机译:退火温度对表面波微波等离子体化学气相沉积法生长的氮化非晶碳薄膜的光学,键合,结构和电性能的影响
机译:甲烷气压对表面波微波等离子体化学气相沉积生长的氮化非晶碳膜光学,电学和结构性能的影响
机译:甲烷流速对表面波微波等离子体化学气相沉积法生长氮化碳薄膜光电性能的影响
机译:微波表面波等离子体CVD生长的氮化非晶碳膜的性质:气体组成压力的影响
机译:微波等离子体电子回旋共振化学气相沉积法沉积的纳米晶和非晶硅薄膜晶体管:材料分析,器件制造和表征。
机译:快速热退火对原子层沉积生长Zr掺杂ZnO薄膜的结构电学和光学性质的影响
机译:通过等离子体增强化学气相沉积和等离子体浸没离子注入和沉积获得的非晶态碳质薄膜的光学,机械和表面特性
机译:通过微波等离子辅助化学气相沉积生长的金刚石薄膜。