Nanometer scale crystallographic texture mapping of platinum and lead zirconate titanate thin films by electron backscatter diffraction

摘要

Automated high resolution electron backscatter diffraction was used to map the local crystallographic texture of Pt and PbZr_1−x Ti _x O₃ (PZT) thin films with a resolution as high as 5 nm. The Pt and PZT films consisted of 99.9% and 94.3% {111} textured grains (i.e., with (111) planes parallel to the substrate surface), respectively. The average Pt and PZT grain sizes were 46 ± 30 nm and 65 ± 30 nm, respectively. Quantification of misorientation distributions and the fraction of non-{111}-textured grains demonstrates the potential of this local texture measurement method for quantifying the ferroelectric variability limits of PZT-based capacitors.