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首页> 外文期刊>Journal of Materials Science >Nanocrystalline wurtzite Si–nickel silicide composite thin films with large band gap and high resistivity
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Nanocrystalline wurtzite Si–nickel silicide composite thin films with large band gap and high resistivity

机译:带隙大,电阻率高的纳米晶纤锌矿硅镍硅化物复合薄膜

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Stabilization of wurtzite Si nanocrystals embedded in a metal/metal silicide matrix by the metal induced crystallization process is demonstrated. The process involves the growth of 50 nm thick Ni films on borosilicate glass (BSG) substrates followed by 700 nm thick amorphous Si films and annealing of this multilayered stack at 550 °C in furnace atmosphere for 1 h. The presence of wurtzite Si is established based on electron diffraction studies and is also confirmed by the Raman signature of wurtzite Si at 504 cm−1. It is shown that the growth of wurtzite Si is mediated by the formation of Nickel Silicide, as evidenced by the Raman signal at 294 cm−1. The films exhibit a band gap greater than 1.9 eV with dc resistances of the order of 10 GΩ. It is proposed that such high resistivities should make this form of Si ideal for PV and microwave device applications.
机译:通过金属诱导的结晶过程证明了嵌入在金属/金属硅化物基质中的纤锌矿型Si纳米晶体的稳定性。该工艺包括在硼硅酸盐玻璃(BSG)衬底上生长50 nm厚的Ni膜,然后生长700 nm厚的非晶硅膜,并在550°C的炉内气氛中对该多层堆叠进行退火1 h。纤锌矿Si的存在是基于电子衍射研究确定的,并且也由纤锌矿Si在504cm -1 的拉曼特征证实。结果表明,纤锌矿型硅的生长是由硅化镍的形成所介导的,如294 cm -1 上的拉曼信号所证明的。薄膜的带隙大于1.9 eV,直流电阻约为10GΩ。提出这样高的电阻率应该使这种形式的Si成为PV和微波设备应用的理想选择。

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