Microstructure, optical and dielectric properties of compositional graded (Ba,Sr)TiO_3 thin films derived by RF magnetron sputtering

摘要

Thin films of compositional graded Ba_(1-x) Sr_xTiO_3 (BST) (x decreasing from 0.3 to 0) were prepared on fused quartz and Pt/Ti/SiO_2/Si substrates by RF magnetron sputtering. The microstructure of the graded BST thin films was characterized by X-ray diffraction (XRD). It indicates that the films were crystallized with peroveskite structure and (100)+(111) preferred orientation. The refractive index and the band gap were determined at room temperature in the wavelength 200-1100 nm from spec-trophotometric measurements of the transmittance. The average value of the refractive index is found to be 2.17 for the graded BST films in the wavelength 400-1000 nm. The optical band gap of the graded BST film was 3.77 eV. The dielectric measurement showed that the dielectric constant and loss factor of the graded BST film was 318.04 and 0.028 at 100 KHz and room temperature.